发明名称 |
CERAMIC SINTERED PLATE CONTAINING UNIAXIALLY ORIENTED ACICULAR Si3N4 PARTICLE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic sintered plate for power module that is improved in heat dissipation without reducing the thickness of a substrate. <P>SOLUTION: There is provided the ceramic sintered plate obtained by sintering at least acicular Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles and granular amorphous Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles, the acicular Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles being oriented along a C axis and having a relative density of 94-98%. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2012236743(A) |
申请公布日期 |
2012.12.06 |
申请号 |
JP20110106872 |
申请日期 |
2011.05.12 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
AOKI SHINSUKE;NAGASE TOSHIYUKI |
分类号 |
C04B35/584;C04B35/626;H01L23/15;H01L23/36 |
主分类号 |
C04B35/584 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|