发明名称 CERAMIC SINTERED PLATE CONTAINING UNIAXIALLY ORIENTED ACICULAR Si3N4 PARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a ceramic sintered plate for power module that is improved in heat dissipation without reducing the thickness of a substrate. <P>SOLUTION: There is provided the ceramic sintered plate obtained by sintering at least acicular Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles and granular amorphous Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles, the acicular Si<SB POS="POST">3</SB>N<SB POS="POST">4</SB>particles being oriented along a C axis and having a relative density of 94-98%. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012236743(A) 申请公布日期 2012.12.06
申请号 JP20110106872 申请日期 2011.05.12
申请人 MITSUBISHI MATERIALS CORP 发明人 AOKI SHINSUKE;NAGASE TOSHIYUKI
分类号 C04B35/584;C04B35/626;H01L23/15;H01L23/36 主分类号 C04B35/584
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