| 摘要 |
PROBLEM TO BE SOLVED: To provide a suitable printhead in an ink-jet printer. SOLUTION: The printhead has a monolithic semiconductor body 26 defining a pressure chamber 33, a nozzle channel 66, and a nozzle opening 22. A piezoelectric actuator 28 including a piezoelectric layer 76 having a thickness of about 50 micrometers or smaller is accossiated with the pressure chamber. The semiconductor body also defines a filter/impedance structure 32 having a plurality of channel openings. The semiconductor body is preferably a polished SOI wafer. In another embodiment, this invention is a printhead having a piezoelectric layer having a surface Ra of about 0.05 micrometers or smaller or including a gap filling material in at least one surface. COPYRIGHT: (C)2008,JPO&INPIT
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