| 摘要 |
<p>A testing apparatus has a plurality of testing units, each of which is provided with a testing module for transmitting/receiving test signals to and from a circuit formed on a wafer to be tested; a connecting section for connecting a transmission path of the test signal between the testing module and the wafer; a holding section for abutting the wafer on the connecting section when a pressure is applied; and a case for storing the holding section and the connecting section. The testing unit tests the wafer inside the case. The testing apparatus is also provided with a storage section, which stores the target wafer to be tested by the testing units and is common to the testing units; a transfer section for transferring the wafers among the storage section and each of the testing units; a main frame for instructing test procedures to each of the testing units; a power supply, which supplies each testing unit with power and is common to the testing units; and a pressure source, which applies pressure to each of the testing units and is common to the testing units.</p> |
