| 发明名称 |
PROBE CARD AND TEST APPARATUS |
| 摘要 |
A probe card comprises a probe; and a probe card substrate which includes a first member and a second member, the first member having a first surface provided with the probe and the second member having a second surface surrounding the first surface, wherein a direction of the first surface is different from a direction of the second surface. |
| 申请公布号 |
US2016291055(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201615060856 |
申请日期 |
2016.03.04 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
FUJIWARA Tomoko;Sueyama Takao;Kaneda Keiko;Ego Michiko |
| 分类号 |
G01R1/073;G01R31/28 |
主分类号 |
G01R1/073 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A probe card comprising:
a probe; and a probe card substrate which includes a first member and a second member, the first member having a first surface provided with the probe and the second member having a second surface surrounding the first surface; wherein a direction of the first surface is different from a direction of the second surface. |
| 地址 |
Minato-ku JP |
