FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

摘要

Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.

主权项

1. A method comprising:
providing a substrate comprising a nanofluidic passage bounded by an electrical conductor; filling the nanofluidic passage with an electrolyte; causing the nanofluidic passage to at least partially close by electrochemically forming an oxide layer on the conductor; and setting a target dimension for the nanofluidic passage, monitoring the size of the nanofluidic passage, and discontinuing causing the nanofluidic passage to at least partially close when the target dimension is reached; and wherein the nanofluidic passage is a surface channel in the substrate.