| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of improving durability of the electrostatic chuck by preventing corrosion of an adhesive layer between a ceramic insulation plate and a metal base.SOLUTION: An electrostatic chuck (1) comprises: a ceramic insulation plate (9) including a first principal surface (5) and a second principal surface (7) and including electrodes (45, 47) for attraction; and a metal base (9) which is joined to a side of the second principal surface (7) of the ceramic insulation plate (9) via an adhesive layer (13). In a plane direction vertical to a thickness direction of the adhesive layer (13), at the outside of the adhesive layer (13), an outer peripheral space (15) interposed between the ceramic insulation plate (9) and the metal base (11) is provided, and further, a gas supplying path for supplying working gas of higher pressure than that of gas in a space around the electrostatic chuck (1) to the outer peripheral space (15) is provided to the ceramic insulation plate (9) or the metal base (11). |
