CHUCK USING NANO-SCALE CILIUM, FABRICATING METHOD AND CHUCKING/DE-CHUCKING METHOD FOR THE SAME

摘要

A chuck, a fabricating method thereof and a chucking/de-chucking method are provided to chuck a substrate through Van der Waals' force of a nano-scale cilium. A chuck comprises a chuck body(50), a base layer(62), and a plurality of nano-scale ciliums(70). The chuck body is formed in a plate shape and faces a substrate in parallel. The base layer is a polymer material sheet attached to one surface of the chuck body. The nano-scale cilium is made of the same material as the base layer and protrudes from one surface of the base layer by 10000~20000/cm2 of density. Each nano-scale cilium has a diameter ranging from 300 to 500 mum and inclines 60~80° on the base layer. The tip of the nano-scale cilium is tapered and inclined 40~50° from one surface of the chuck body.