发明名称
摘要 Disclosed is a cantilever-type probe and methods of fabricating the same. The probe is comprised of a cantilever being longer lengthwise relative to the directions of width and height, and a tip extending from the bottom of the cantilever and formed at an end of the cantilever. A section of the tip parallel to the bottom of the cantilever is rectangular, having four sides slant to the lengthwise direction of the cantilever.
申请公布号 JP2009503537(A) 申请公布日期 2009.01.29
申请号 JP20080524892 申请日期 2006.08.02
申请人 发明人
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
代理机构 代理人
主权项
地址