发明名称 WORKPIECE POSITIONING DEVICE
摘要 Disclosed is a workpiece positioning device. The disclosed workpiece positioning device comprises: a vacuum table on which a workpiece is loaded and has a plurality of first penetration holes; a first elevation member provided below the vacuum table and having a plurality of first poles inserted into the first holes to be movable vertically; a moving stage provided below the first elevation member to move the first elevation member in a direction parallel to the vacuum table; a second elevation member provided below the moving stage and having a plurality of second poles supporting the first elevation member; and a vertical driving unit moving the second poles in a vertical direction.
申请公布号 KR20160105141(A) 申请公布日期 2016.09.06
申请号 KR20150028449 申请日期 2015.02.27
申请人 EO TECHNICS CO., LTD. 发明人 LEE, GYO JUN;AHN, SEONG HO;CHO, KYU HWAN
分类号 B23Q3/08;B23K26/60;H01L21/68 主分类号 B23Q3/08
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