发明名称 |
WORKPIECE POSITIONING DEVICE |
摘要 |
Disclosed is a workpiece positioning device. The disclosed workpiece positioning device comprises: a vacuum table on which a workpiece is loaded and has a plurality of first penetration holes; a first elevation member provided below the vacuum table and having a plurality of first poles inserted into the first holes to be movable vertically; a moving stage provided below the first elevation member to move the first elevation member in a direction parallel to the vacuum table; a second elevation member provided below the moving stage and having a plurality of second poles supporting the first elevation member; and a vertical driving unit moving the second poles in a vertical direction. |
申请公布号 |
KR20160105141(A) |
申请公布日期 |
2016.09.06 |
申请号 |
KR20150028449 |
申请日期 |
2015.02.27 |
申请人 |
EO TECHNICS CO., LTD. |
发明人 |
LEE, GYO JUN;AHN, SEONG HO;CHO, KYU HWAN |
分类号 |
B23Q3/08;B23K26/60;H01L21/68 |
主分类号 |
B23Q3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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