发明名称 METHOD FOR COATING SURFACES
摘要 Provided is a method for providing a protection layer on a substrate. A ceramic layer is deposited on the substrate. The ceramic layer has porosity. Localized heat is provided to a region of the ceramic layer at a temperature for melting the ceramic layer without damage to the substrate. Melting the ceramic layer reduces the porosity or seals fissures or cylindrical particle boundaries. The region of the ceramic layer heated by the localized heat is scanned on the ceramic layer.
申请公布号 KR20160105320(A) 申请公布日期 2016.09.06
申请号 KR20160021756 申请日期 2016.02.24
申请人 LAM RESEARCH CORPORATION 发明人 HUANG LIHUA LI;PATTON EVAN E.;POPIOLKOWSKI ALAN;RICHARDSON BRETT C.;SHIH HONG
分类号 H01L21/56;H01L21/02;H01L21/324;H01L21/48 主分类号 H01L21/56
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