INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device and inspection method that reduce a correction error to allow an exact line width error to be acquired.SOLUTION: An inspection device 100 includes: a gradation value correction unit 131 that corrects optical image data on the basis of a change in amount of light of a light source 105; and a line width error acquisition unit 119 that obtains a line width of a pattern from the corrected optical image data, and acquires a line width error serving as a difference between the line width and a line width of a pattern of reference image data corresponding to the optical image data. A transmission TDI sensor 113 comprises: a first area on which light transmitted through a mask Ma is incident; and a second area on which light branched from light from the light source 105 and illuminating the mask Ma is incident. The gradation value correction unit 131 is configured to obtain a change in gradation value of the optical image data acquired from the light incident on the second area to correct the gradation value of the optical image data acquired from the light incident on the first area.SELECTED DRAWING: Figure 1