| 发明名称 |
PROCESSING APPARATUS AND PROCESSING METHOD |
| 摘要 |
A processing apparatus includes a rotary table that causes a workpiece to rotate around a rotary axis, a roller-shaped member that rotates on an axis orthogonal to the rotary axis of the rotary table, a vertical driving section that is driven in a direction of the rotary axis of the rotary table so as to bring the roller-shaped member and the workpiece into contact with each other, an ultraviolet ray irradiation source that irradiates a portion between the roller-shaped member and the workpiece with an ultraviolet ray, a polishing material that is supplied to the portion between the roller-shaped member and the workpiece, and a light scattering medium that is supplied to the portion between the roller-shaped member and the workpiece and scatters an ultraviolet ray from the ultraviolet ray irradiation source. |
| 申请公布号 |
US2016379838(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201615099590 |
申请日期 |
2016.04.15 |
| 申请人 |
Panasonic Corporation |
发明人 |
TAKASU YOSHIFUMI;YOKOYAMA NOBUYUKI;TASHIRO ISAO;KAMIKIHARA NOBUYUKI |
| 分类号 |
H01L21/306;B24B37/11;H01L21/268;H01L21/687;H01L21/67;B24B37/04;B24B21/12 |
主分类号 |
H01L21/306 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A processing apparatus comprising;
a rotary table that causes a workpiece to rotate around a rotary axis; a roller-shaped member that rotates on an axis orthogonal to the rotary axis of the rotary table; a vertical driving section that is driven in a direction of the rotary axis of the rotary table to bring the roller-shaped member and the workpiece into contact with each other; an ultraviolet ray irradiation source that irradiates a portion between the roller-shaped member and the workpiece with an ultraviolet ray; a polishing material that is supplied to the portion between the roller-shaped member and the workpiece; and a light scattering medium that is supplied to the portion between the roller-shaped member and the workpiece to scatter the ultraviolet ray from the ultraviolet ray irradiation source. |
| 地址 |
Osaka JP |
