| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus, which polishes an object to be polished, and cleans and drys it, then transfers out the object that is clean and dry. <P>SOLUTION: The polishing apparatus comprises a robot 10 for transferring the object S in the apparatus; a loading section 11, in which the object S to be polished is placed and which is arranged within reach of the gripping arm of the robot 10; a polishing section 13 in which the object S transferred thereto from the load section 11 is polished; a cleaning section 15 in which the polished object S is cleaned and dried; and an unloading section 12 in which the object S, clean and dry after having been polished, is placed and which is arranged within reach of the gripping arm of the robot 10. The robot 10 can pick the object S to be polished out of the loading section 11 and transfer the object S, which is polished, cleaned, and dried, to the unloading section 12. <P>COPYRIGHT: (C)2003,JPO |
