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发明名称
摘要
申请公布号
JP3661962(B2)
申请公布日期
2005.06.22
申请号
JP19960217011
申请日期
1996.08.19
申请人
发明人
分类号
H01L21/8238;G11C11/409;H01L27/092;H03K17/0412;H03K19/00;H03K19/003;H03K19/0175;(IPC1-7):H03K19/017;H01L21/823
主分类号
H01L21/8238
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