发明名称 METHOD OF ARRANGING DIES IN A WAFER FOR EASY INKLESS PARTIAL WAFER PROCESS
摘要 <p>In a method and system for fabricating a full wafer (600) having dies, an orientation marker (606), and a reference die, includes configuring a reticle pattern (602) that is configured by arranging the dies in an array having m rows and n columns, where the m rows start in a row adjacent to the orientation marker, and m and n are integers. The reticle pattern is transferred to the full wafer to sequentially form a portion of the dies. The transferring includes placing an inkless marker in the form of one or more non-circuit dies between the n columns of adjacent reticle patterns. The reticle pattern is repeatedly transferred to form a remaining portion of the dies to complete the full wafer. A wafer map for the full wafer is stored, with the wafer map including a non-circuit bin containing data describing the inkless marker.</p>
申请公布号 WO2008045826(A2) 申请公布日期 2008.04.17
申请号 WO2007US80700 申请日期 2007.10.08
申请人 TEXAS INSTRUMENTS INCORPORATED;SUBRAMANIAN, BALAMURAGUN 发明人 SUBRAMANIAN, BALAMURAGUN
分类号 H01L21/00 主分类号 H01L21/00
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