| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element which can perform a pressure measurement in a wide measuring range.SOLUTION: A pressure sensor element 100 includes: a base 20; a diaphragm 10 which is overlapped with the base 20 in plan view and fixed to the base 20, and has a pressure receiving part 16 including a thick part 14 and a thin part 12 thinner than the thick part 14 and deforming by receiving pressure; and a pressure sensitive element 30 which is disposed at a position of being surrounded by the outer edge of the thick part 14 in plan view, on a face 14a side of the thick part 14 on the base 20 side. |
