Precision convection system

摘要

A system can use light to analyze a sample dimensionally, for example via shadow moiré analysis. The system can apply convection to heat the sample during analysis. A platform of the system can support the sample during convection-based heating. The system can include nozzles that are arranged circumferentially about the platform. The nozzles can have openings oriented towards the platform to emit heated air towards the sample, to heat the sample. Members such as fins or posts within each nozzle can diffuse or spread the emitted air.

主权项

1. A system comprising:
a platform comprising:
an upper side that comprises a central portion and a periphery; anda plurality of vanes that are disposed on the upper side and that radiate outward from the central area of the upper side towards the periphery of the upper side; a plurality of nozzles disposed about the periphery, each nozzle comprising:
an outlet facing towards the central portion; anda plurality of members that are disposed in each nozzle and that are operative to spread heated air flowing out of the outlet; a first air channel extending circumferentially about the plurality of nozzles; a plurality of second air channels, each second air channel extending between the first air channel and a respective nozzle in the plurality of nozzles, each second air channel comprising a heater; a shadow moiré grating disposed adjacent the upper side of the platform; and a separation between the shadow moiré grating and the upper side of the platform, the separation sized for receiving a circuit to undergo dimensional testing.