发明名称 SILICON NITRIDE SINTERED COMPACT HAVING HIGH THERMAL CONDUCTIVITY, SILICON NITRIDE SUBSTRATE AND SILICON NITRIDE CIRCUIT SUBSTRATE USING SAME, AND SEMICONDUCTOR DEVICE
摘要 A high-thermal-conductivity silicon nitride sintered compact having a thermal conductivity of 50 W/m∙K or higher and a three-point bending strength of 600 MPa or greater, wherein the silicon nitride sintered compact is characterized in that when an arbitrary cross-section of the silicon nitride sintered compact is subjected to XRD analysis, the peak ratio (I29.3°)/(I27.0° + I36.1°) is in the range of 0.01-0.08 and the peak ratio (I29.7°)/(I27.0° + I36.1°) is in the range of 0.02-0.16, where I29.3°, I29.7°, I27.0°, and I36.1° are the strongest peak intensities detected at diffraction angles of 29.3 ±0.2°, 29.7 ±0.2°, 27.0 ±0.2°, and 36.1 ±0.2°, respectively. The above configuration makes it possible to provide a silicon nitride sintered compact having high thermal conductivity of 50 W/m∙K or higher and excellent insulating properties and strength.
申请公布号 WO2016117553(A1) 申请公布日期 2016.07.28
申请号 WO2016JP51427 申请日期 2016.01.19
申请人 KABUSHIKI KAISHA TOSHIBA;TOSHIBA MATERIALS CO., LTD. 发明人 AOKI, KATSUYUKI
分类号 C04B35/584;H01L23/12;H01L23/13;H01L23/36;H05K1/03;H05K1/05 主分类号 C04B35/584
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