INSPECTION APPARATUS AND METHOD FOR LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE HEAD

摘要

An apparatus for inspecting a liquid discharge head including an energy generation element provided on an element substrate and configured to make energy act on a liquid to discharge the liquid from an orifice, a lower protection film having an electrical insulating property and provided on the element substrate while covering the energy generation element, a wiring layer provided between the element substrate and the lower protection film and configured to supply electrical signal for driving to the energy generation element, and a conductive upper protection film provided on the lower protection film is provided. The apparatus comprises a detection circuit configured to detect a potential of the upper protection film when the energy generation element is driven; and a determination circuit configured to determine a driving state of the energy generation element from information about the potential detected by the detection circuit.

主权项

1. An inspection apparatus for inspecting a liquid discharge head including an energy generation element provided on an element substrate and configured to make energy act on a liquid to discharge the liquid from an orifice, a lower protection film having an electrical insulating property and provided on the element substrate while covering the energy generation element, a wiring layer provided between the element substrate and the lower protection film and configured to supply an electrical signal for driving to the energy generation element, and a conductive upper protection film provided on the lower protection film, comprising:
a detection circuit configured to detect a potential of the upper protection film when the energy generation element is driven; and a determination circuit configured to determine a driving state of the energy generation element from information about the potential detected by the detection circuit.