发明名称 |
Method for Producing an Integrated Micromechanical Fluid Sensor Component, Integrated Micromechanical Fluid Sensor Component and Method for Detecting a Fluid by Means of an Integrated Micromechanical Fluid Sensor Component |
摘要 |
A method for producing an integrated micromechanical fluid sensor component includes forming a first wafer with a first Bragg reflector and with a light-emitting device on a first substrate. The light-emitting device is configured to emit light rays in an emission direction from a surface of the light-emitting device facing away from the first Bragg reflector. The method further includes forming a second wafer with a second Bragg reflector and with a photodiode on a second substrate. The photodiode is arranged on a surface of the second Bragg reflector facing towards the second substrate. The method also includes bonding or gluing the first wafer to the second wafer such that there is formed a cavity into which a fluid is introduced and through which the light rays can pass. The method further includes separating the fluid sensor component from the first and the second wafer. |
申请公布号 |
US2016334329(A1) |
申请公布日期 |
2016.11.17 |
申请号 |
US201415112163 |
申请日期 |
2014.11.21 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
Fix Richard;Hartke Rene;Beintner Jochen |
分类号 |
G01N21/3504;H01S5/026;H01S5/183;G01N21/39 |
主分类号 |
G01N21/3504 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Stuttgart DE |