| 主权项 |
1. A pressure sensor comprising:
a first substrate having one surface and an other surface opposite to the one surface, and including a first diaphragm on the one surface provided by a first recess on the other surface; a first detecting element arranged in the first diaphragm on the one surface; and a second substrate arranged on the one surface of the first substrate, and providing a first reference pressure chamber that is arranged between the first substrate and the second substrate and applies first reference pressure to the one surface of the first diaphragm, wherein: the first detection element outputs a detection signal according to pressure difference between pressure of a measurement medium introduced to the first recess and the first reference pressure in the first reference pressure chamber; the first substrate includes a second diaphragm on the one surface provided by a second recess on the other surface; and the first reference pressure chamber applies the first reference pressure to the one surface of the second diaphragm together with the one surface of the first diaphragm; the pressure sensor further comprising: a third substrate attached to the other surface of the first substrate, and including a second reference pressure chamber that seals the second recess and applies second reference pressure to the other surface of the second diaphragm; a second detecting element arranged in the second diaphragm on the one surface, and outputs a reference signal according to pressure difference between the first reference pressure in the first reference pressure chamber and the second reference pressure in the second reference pressure chamber; and a calculator calculating an offset value by calculating a differential value between the reference signal and an inspection signal outputted from the first detecting element in accordance with pressure difference between the first reference pressure in the first reference pressure chamber and pressure of a reference medium different from the pressure of the measurement medium to be introduced to the first recess, and detecting the pressure of the measurement medium in accordance with a differential value between the detection signal and the offset value, wherein: when the first substrate has one direction as a longitudinal direction, the first substrate has one end in the longitudinal direction as a fixed end sealed by mold resin, and an other end in the longitudinal direction as a free end; and the first diaphragm is arranged closer to the free end than the second diaphragm. |
