| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head manufacturing method that stabilizes the discharge of ink droplets and an inkjet recording head manufactured by the method. SOLUTION: The manufacturing method for an inkjet recording head having discharge openings to discharge ink, and has the process of forming a discharge opening by dry etching a discharge opening forming member to form the discharge opening. The discharge opening forming member is formed of a resin containing Si and the dry etching process uses an etching gas, the essential constituent of which is oxygen and chlorine. COPYRIGHT: (C)2005,JPO&NCIPI |
