| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet head that can simultaneously prevent foreign matter from adhering to a periphery of a nozzle hole and form a projection for protecting an opening edge of the nozzle hole and the periphery thereof, and the inkjet head. SOLUTION: An ink repellent film 2 and a photoresist layer 3 are laminated on one face of a substrate 1 and processing of drilling is applied to the substrate 1 from the other face side of the substrate 1 to form the nozzle hole N passing through the substrate 1 and the ink repellent film 2 (Fig. 5(a)). Processing of exposing is carried out by using a photomask M2 (Fig. 5(b)). The photoresist layer 3 opposite to the nozzle hole N and the periphery thereof is removed by processing of developing, and then to form projections 30, 30 (Fig. 5(c)). COPYRIGHT: (C)2007,JPO&INPIT
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