发明名称 Method of Manufacturing a Patterned Colour Conversion Layer, a Colour Conversion Filter and an Organic EL Display that Use the Colour Conversion Layer
摘要 A method of manufacturing a colour conversion layer with a predetermined pattern without causing any damage on the colour conversion layer formed by a dry process such as an evaporation method to achieve a large scale and high definition. A method of manufacturing a patterned colour conversion layer is disclosed, which comprises steps of: sequentially forming, on a substrate (10), an etch stop layer (20), a colour conversion layer (39) by means of an evaporation method, a protective layer (40) and a transparent mask layer (50); making <B>a</B> resist layer (60) formed on the transparent mask layer to have a predetermined pattern; making the transparent mask layer to have the pattern using the patterned resist layer as a mask; removing the patterned resist layer; making the protective layer and the colour conversion layer to have the pattern by means of a dry etching method using the patterned transparent mask layer as a mask.
申请公布号 GB2440635(A) 申请公布日期 2008.02.06
申请号 GB20070014280 申请日期 2007.07.23
申请人 FUJI ELECTRIC HOLDINGS COMPANY LIMITED 发明人 YUKINORI KAWAMURA
分类号 G03F7/00;H01L51/50;H05B33/10 主分类号 G03F7/00
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