发明名称 RESIN SEALING METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To perform resin sealing of high quality by accurately and easily calculating the amount of resin necessary for the sealing. SOLUTION: A resin sealing method is disclosed for sealing a semiconductor chip mounted on a substrate 20, and the resin sealing method includes: an arrangement process of arranging the substrate 200 mounted with the semiconductor chip 202 in a predetermined closed space; a state changing process of changing gas present in the closed space M from a first state to a second state; a measuring process of measuring an amount of change made through the state changing process; and a calculating process of calculating the amount of resin to be fed into a metal mold based upon the measured change, the resin sealing is performed through the processes. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009088403(A) 申请公布日期 2009.04.23
申请号 JP20070258971 申请日期 2007.10.02
申请人 SUMITOMO HEAVY IND LTD 发明人 YANAI MITSUHIRO
分类号 H01L21/56 主分类号 H01L21/56
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