SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of monitoring a data receiving condition. SOLUTION: The substrate treatment device comprises: a plurality of device side modules A-Z provided on a semiconductor manufacturing device for transmitting/receiving data; a monitoring module to be communicated with the device side modules A-Z; and communication programs incorporated in the device side modules and the monitoring module for communicating data between each of the device side modules A-Z and the monitoring module. The communication program for the monitoring module monitors receiving intervals for the data received by the deice side modules A-Z and determines whether the data is normally received or not. COPYRIGHT: (C)2009,JPO&INPIT