| 摘要 |
Disclosed is a reciprocating-type deposition system for producing an OLED panel. The deposition system comprises: a buffer capable of storing an OLED substrate; a plurality of alignment apparatuses which are located in the upper part to receive substrates from the buffer and which can be operated independently from each other; a transport system located in the upper part to transport the substrate to the buffer, plurality of alignment apparatuses and buffer for the next process; a linear evaporation source, located in the lower part, for uniformly depositing during linear reciprocal movements; a rail, located in the lower part, for creating a pathway for the linear evaporation source; and a vacuum chamber system comprising the plurality of alignment apparatuses, transport system, linear evaporation source and rail. By eliminating a cluster from a deposition system utilizing precise alignment apparatuses, the the present invention obviates the need for a central transport robot to correct a substrate angle for each deposition apparatus, thereby simplifying the system and optimizing the installation space. |
