| 摘要 |
The present invention relates to a peeling device which peels off a reinforcing sheet stuck on a substrate, including: a supporting unit which supports one main surface of a laminate having the substrate and the reinforcing sheet; a plate-shaped flexible member to be attached to the other main surface of the laminate; a plurality of pads fixed to a surface of the flexible member lying opposite to the laminate side; a plurality of rods each of which is coupled to any one of the plurality of pads; a plurality of driving devices by which the plurality of rods are made to move, respectively, in their individual axial directions; and a control device by which a position of each of the plurality of rods is controlled on an individual basis, in which each of the plurality of pads is coupled to any one of the plurality of the rods via any one of a plurality of joints so that each pad is allowed to be pivotable centering on a vicinity of an intersection point of a centerline of the rod coupled thereto with a surface of the reinforcing sheet facing the substrate side or a surface of the substrate facing the reinforcing sheet side, and in which the one main surface of the laminate is supported by the supporting unit, and at the same time, the position of each of the plurality of rods is controlled by the control device so that the other main surface of the laminate is subjected to bending deformation in sequence from one-end side thereof.
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