| 摘要 |
An optical system and a three-dimensional shape measuring method using a picture obtained from the optical system are provided to inspect defects accurately when measuring the three-dimensional shape of a semiconductor or minute fine components by acquiring a plurality of light interference patterns and measuring the three-dimensional shape. An optical system comprises a phase transfer unit(300), a light interference unit(400), a light splitting unit(500) and an image acquiring unit(600). The phase transfer unit moves a standard surface. The light interference unit reflects light from an illumination unit(200) in the standard surface and generates synthesized interference light. The light splitting unit splits the synthesized interference light from the light interference unit into a plurality of different wavelengths and outputs it. The image acquiring unit receives the split lights of different wavelengths, and acquires a plurality of light interference patterns as an image.
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