| 摘要 |
PROBLEM TO BE SOLVED: To provide an expand device which simplifies the structure and suppresses contaminations. SOLUTION: The expand device includes a fixed ring 2 and a pressure ring 3 provided to be elevated to the fixed ring 2 and is configured to expand an elastic sheet where an electronic component is bonded by pressing a ring frame where the elastic sheet is stuck against the fixed ring 2 by the pressure ring 3. The device also includes a plurality of driven gears 10 for transmitting driving force to an elevation means provided to the pressure ring 3, a driving gear 11 attached to a motor 8 for elevation, and a rotatable ring gear 9 where gear trains 9a and 9b that the driven gears 10 and driving gear 11 engage are formed circumferentially at an equal interval. COPYRIGHT: (C)2009,JPO&INPIT |
