| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transport apparatus and a substrate processing apparatus which shorten the adjustment time during the assembly. <P>SOLUTION: This invention relates to a substrate transport apparatus including: a driving part; a first shaft having a transportation roller contacting with the substrate thereby providing a transporting force; a second shaft transmitting a driving force of the driving part to the first shaft; a support member detachably supporting the first shaft; and a connection member detachably connecting the first shaft with the second shaft. The connection member is formed so as to allow misalignment in the radial direction at the first shaft and the second shaft. <P>COPYRIGHT: (C)2013,JPO&INPIT |
