| 摘要 |
A substrate transfer system for holding a substrate using vacuum adsorption and equipped with: a plurality of adsorption pads which have adsorption surfaces having vacuum holes formed therein and projections formed thereon so as to surround the vacuum holes, and in a manner such that the top surfaces of the projections contact locations on the substrate separated from one another; an arm part for supporting the plurality of adsorption pads; and a vacuum device for setting the interior of a vacuum channel to a negative pressure relative to the surroundings thereof, and connected to the vacuum holes in the plurality of adsorption pads via the vacuum channel. |
