| 摘要 |
A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about an axis perpendicular to a plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses are opposite. Axes of linear detection motion of each of the detection masses are aligned. |
