Dual-Probe Scanning Probe Microscope

摘要

An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

主权项

1. An atomic force microscope (AFM) comprising:
a first probe including a tip having a first height, h1; a second probe including a tip having a second height, h2, wherein a mechanical path between the first probe and a sample and the second probe and the sample is the same; a controller that controls an actuator coupled to the first and second probes in response to the deflection of the first probe; wherein a setpoint associated with the controller is modified based on a known difference in the heights of the first and second probe tips; and wherein 1>h2.