| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coating device which makes mist hardly stick to a substrate even when miniaturized.SOLUTION: A spin coating device 30 is provided with a triangular fin 50 below a mounting face 41a in an inner wall face 33b of a cylindrical part 33 of a housing 31, thereby making the fin 50 forcibly generate a longitudinal vortex R. The longitudinal vortex R generated when getting over a hypotenuse 50a of the fin 50 enables a rolled-back part F of air that has caused a mist swirl to keep away from a substrate D by driving the rolled-back part F forcibly downward. This can reduce influences of the rolled-back part F of mist from below in a vicinity of a rear face 70D of the substrate D. Therefore, even when a gap between a spin coat body 40 and the inner wall face 33b of the cylindrical part 33 of the housing 31 is reduced to miniaturize the housing 31, that is, the device 30, mist can be made to hardly stick to the rear face 70D of the substrate D.SELECTED DRAWING: Figure 3 |
