| 摘要 |
PURPOSE: Provided are gas sensor with an enhanced sensitivity, low power consumption, a low heat capacity and heat loss, and its fabrication method, wherein a heating line and a sensing line are formed being apart from a substrate by using a semiconductor manufacturing process and a ceramic bulk of gas sensitive material are formed extending over the heat and the sensing lines. CONSTITUTION: The gas sensor comprises: a silicon substrate provided with a recess formed by patterning into a predetermined depth; an insulating layer formed on top of the silicon substrate except the recess; a first conductive patterned layer crossing the recess and being fixed to the insulating layer, to electrically be isolated from the silicon substrate; a second conductive patterned layer patterned layer crossing the recess and being fixed to the insulating layer, to electrically be isolated from the silicon substrate and the first conductive patterned layer; and a gas detecting portion formed on both predetermined portions of the first and the second conductive patterned layers.
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