INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection device and method for outputting an accurate matching position even when a search image contains a pattern similar to a template. SOLUTION: An image search unit includes a relative position comparing unit which compares the relative position of a template in a template selection image with the relative position of a location currently being searched for in a search image, and outputs the amount of positional displacement between the relative positions. A matching position determining unit determines a matching position by taking into consideration the amount of positional displacement in addition to search image similarity distribution information. COPYRIGHT: (C)2009,JPO&INPIT