| 摘要 |
The present invention is a composition which is for use in forming an overcoat film for immersion exposure and which comprises [A] a polymer component that contains a polymer (A1) and [B] a solvent, said polymer (A1) having structural units (I) that each contain a group represented by formula (1). In formula (1), R1 is an alkali-dissociable group, R2 is a (n+1)-valent linking group, and A is -CO-O-*, -SO2-O-*, an oxygen atom, or -NR3-, with the proviso that a case wherein A is an oxygen atom and the directly-A-bonded moiety of R2 is a carboxyl group or a sulfonyl group is excepted. |
