发明名称 音叉型圧電振動片、音叉型圧電振動デバイス、及び、音叉型圧電振動片の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a tuning-fork type piezoelectric vibrating piece capable of easily forming an electrode pattern of a lead electrode on a base, a tuning-fork type piezoelectric vibrating device in which the tuning-fork type piezoelectric vibrating piece is mounted and a method for manufacturing the tuning-fork type piezoelectric vibrating piece.SOLUTION: In a tuning-fork type piezoelectric vibrating piece 2 including a first arm 21 and a second arm 22, and a base 23 on which the first arm 21 and the second arm 22 are formed by protruding, the first arm 21 and the second arm 22 include excitation portions 211 and 222 having a groove 25 on at least one main surface. In the excitation portions 211 and 222, through holes 26 are formed on end portions 212 and 221 located at the end sides in the protruding directions of the first arm 21 and the second arm 22 closer than the grooves 25. Excitation electrodes 31 and 32 formed on both main surfaces of the excitation portions 211 and 222 including the insides of the grooves 25 are electrically connected via the through holes 26.
申请公布号 JP5935664(B2) 申请公布日期 2016.06.15
申请号 JP20120255024 申请日期 2012.11.21
申请人 株式会社大真空 发明人 藤井 智;古城 有果
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H03H3/02;H03H3/04;H03H9/02;H03H9/10;H03H9/215 主分类号 H03H9/19
代理机构 代理人
主权项
地址