| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate table having a sensor which resolves one or more existing difficulties. <P>SOLUTION: A substrate table comprises a sensor which includes a material block provided with a material layer opaque to radiation. The material layer has at least one window configured to permit transmission of radiation. The sensor comprises a wavelength conversion material located at the window, and a waveguide located so as to receive radiation emitted from the wavelength conversion material. The waveguide is embedded in the material block, and configured to direct the radiation emitted from the wavelength conversion material toward a detector through the material block. <P>COPYRIGHT: (C)2013,JPO&INPIT |
