| 摘要 |
PROBLEM TO BE SOLVED: To enhance productivity.SOLUTION: A substrate processing method includes a pretreatment step, a process liquid supply step, and a housing step. The pretreatment step performs pretreatment, requiring atmosphere management or time management after treatment, for a substrate. The process liquid supply step supplies process liquid, containing a volatile component and forming a film on the substrate, to the substrate after the pretreatment step. The housing step houses a substrate, where the process liquid has solidified or hardened due to evaporation of the volatile component, in a transport container. |
