| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method having high productivity that can finely and highly accurately form an electrode of a laminated film of Au and Ni on a small-sized piezoelectric vibration device.SOLUTION: A laminated film made of Au and Ni is formed on a vibration piece made of a piezoelectric material. In addition, an electrode is formed by continuously etching the formed laminated film of Au and Ni with an etching liquid containing iodine, an iodine compound, and potassium chloride. |
