MEMS DEVICE POSITIONING APPARATUS, TEST SYSTEM, AND TEST METHOD

摘要

A positioning apparatus includes a support structure, a positioning structure, and a fixture for retaining MEMS devices. A shaft spans between the support structure and the positioning structure, and is configured to rotate about a first axis relative to the support structure in order to rotate the positioning structure and the fixture about the first axis. The positioning structure includes a pair of beams spaced apart by a third beam. Another shaft spans between the pair of beams and is configured to rotate about a second axis relative to the positioning structure in order to rotate the fixture about the second axis. Methodology entails installing the positioning apparatus into a chamber, orienting the fixture into various positions, and obtaining output signals from the MEMS devices to determine functionality of the MEMS devices.

主权项

1. A method of testing a microelectromechanical systems (MEMS) device comprising:
loading said MEMS device into a fixture of a positioning apparatus, said positioning apparatus including a support structure, a positioning structure, a first shaft spanning between said support structure and said positioning structure, and a second shaft in physical communication with said positioning structure, said fixture being retained on said second shaft; installing said positioning structure and said fixture into a test chamber; placing said fixture into a first position; obtaining a first output signal from said MEMS device in said first position; orienting said fixture into a second position by rotating at least one of said first and second shafts, wherein said orienting operation rotates said fixture about at least one of first and second orthogonal axes; obtaining a second output signal from said MEMS device in said second position; and determining a functionality of said MEMS device utilizing said first and second output signals.