LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

A control device configured to determine a primary first drive signal, based on a first error signal representing a difference between desired and measured positions of a first body, for driving a positioner driving the first body; determine a primary second drive signal, based on a second error signal representing a difference between desired and measured positions of a second body, for driving a positioner driving the second body; determine, based on the second error signal, a secondary first drive signal for driving the first body positioner; determine, based on the first error signal, a secondary second drive signal for driving the second body positioner; combine the primary and secondary first drive signals and combine the primary and secondary second drive signals; and output the combined first and second drive signals to the respective positioning devices.

主权项

1. A control device configured to control a synchronous positioning of a multi-body system, the control device comprising:
an input configured to receive a first error signal representing a difference between a desired position of a first body of the multi-body system and a measured position of the first body, and a second error signal representing a difference between a desired position of a second body of the multi-body system and a measured position of the second body; the control device being configured to:
determine, based on the first error signal, a primary first drive signal for driving a positioning device configured to drive the first body,determine, based on the second error signal, a primary second drive signal for driving a positioning device configured to drive the second body,determine a secondary first drive signal for driving the positioning device configured to drive the first body, the secondary first drive signal being based on the second error signal,determine a secondary second drive signal for driving the positioning device configured to drive the second body, the secondary second drive signal being based on the first error signal, andcombine the primary first drive signal and the secondary first drive signal to obtain a combined first drive signal and combining the primary second drive signal and the secondary second drive signal to obtain a combined second drive signal; and the control device further comprising an output configured to output the combined first drive signal and the combined second drive signal to the respective positioning devices.