ON-BOARD SUPPLY SYSTEM FOR A STAGE ASSEMBLY

摘要

A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

主权项

1. A stage assembly that moves a device, the stage assembly comprising:
a stage that is adapted to retain the device, the stage including a circulation conduit; a base; a stage mover assembly that moves the stage relative to the base, the stage mover assembly including a magnet assembly, and a conductor assembly; wherein one of the assemblies is coupled to the stage, and the other of the assemblies is coupled to the base; and a supply system that is secured to and positioned on the stage, the supply system including a circulation system that circulates a circulation fluid through the circulation conduit on the stage.