| 摘要 |
PROBLEM TO BE SOLVED: To provided a small-sized pressure sensor module provided with a radio communication function. SOLUTION: In this pressure sensor module, a sensor substrate 10 for detecting pressure fluctuation by deformation of a sensor part 11 is mounted on a support substrate 30 via a sealant 50 for surrounding the sensor part 11, and an antenna pattern 20 is fixed, on an upper face of the sensor substrate 10, to be connected electrically to an electronic component element 40 constituting an oscillation circuit for a prescribed frequency of oscillation based on pressure information from the sensor part 11. COPYRIGHT: (C)2005,JPO&NCIPI
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