ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS USING THE SAME,申请号EP20040773236-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS USING THE SAME
摘要
申请公布号	EP1668679(A1)	申请公布日期	2006.06.14
申请号	EP20040773236	申请日期	2004.09.10
申请人	CANON KABUSHIKI KAISHA	发明人	SUZUKI, AKIYOSHI
分类号	G03F7/20;G02B27/00;G02B27/09;H01L21/027;(IPC1-7):H01L21/027;G02B5/32	主分类号	G03F7/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Device and method for recording meter readings

METHODS FOR THE EX-VIVO REPLICATION AND STABLE GENETIC TRANSFORMATION OF HUMAN STEM CELLS

Pure nanoclay and process for preparing nanoclay

Apparatus for simulating moving flames

Amplifier circuit with a first and a second output line

Water treatment containing DBNPA for use in sanitizing recreational water

Injection device

Rotationally moulded products and moulds

Guided missile with a sleeve for mountig a guiding system

Silicon derivatives for pet imaging

Miner acoustic communication and location system

Fungicide heterocyclyl-pyrimidinyl-amino derivatives

Spilt-cycle engine with early crossover compression valve openning

Novel crystal of (S)-(+)-2-(2-chlorophenyl)-2-hydroxy-ethyl carbamate

Apparatus for autonomously performing physiotherapic exercises

System of connection between profiled tubes via node elements

Sheet material for medical use

Antidepressant, neuroprotectant, amyloid beta deposition inhibitor or age retardant containing heterocyclic compound having specific structure