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发明名称
Verfahren zur Herstellung eines integrierten ferroelektrischen Speichers
摘要
申请公布号
DE10116875(B4)
申请公布日期
2006.06.14
申请号
DE20011016875
申请日期
2001.04.04
申请人
INFINEON TECHNOLOGIES AG
发明人
HARTNER, WALTER;KROENKE, MATTHIAS;WEINRICH, VOLKER
分类号
H01L21/8239;H01L21/02;H01L21/8246;H01L27/115
主分类号
H01L21/8239
代理机构
代理人
主权项
地址
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