| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor of high sensitivity having a band width that is higher than that being currently used. SOLUTION: This pressure sensor, or the like, includes a diaphragm 102, where the diaphragm has a rigid outer portion and a displacing inner portion displaced, in response to a pressure difference between the first side and the second side of the diaphragm, includes a sensor 104, arranged neighboring close to the diaphragm to sense displacement in the inner portion of the diaphragm, and includes a monitoring control system connected to the sensor, and for finding the pressure difference, based on the displacement of the diaphragm. COPYRIGHT: (C)2009,JPO&INPIT
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