| 摘要 |
When a cleaning liquid becomes supplied to a casing (1) by a liquid supply flow path (3), air in the casing (1) is discharged to outside air by an air flow path (5). This reduces a load occurring when the casing (1) is filled and sealed with the cleaning liquid, allowing the casing (1) to be filled and sealed in a short time. Also, when the cleaning liquid becomes discharged from the casing (1), air flows into the casing (1) through the air flow path (5), and this reduces a load caused by the discharge of the cleaning liquid. |
